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microactuators
Low-voltage puzzle-like fractal microelectromechanial system variable capacitor suppressing pull-in
1 min read ·
Thu, Oct 4 2012
News
fractals
Circuits
microactuators
Amro M. Elshurafa, et al., "Low-voltage puzzle-like fractal microelectromechanial system variable capacitor suppressing pull-in" Micro & Nano Letters 7, (9), 2012, 965. Abstract: This Letter introduces an electrostatically actuated fractal MEMS variable capacitor that, by utilising the substrate, extends the tuning range (TR) beyond the theoretical limit of 1.5 as dictated by the pull-in phenomenon. The backbone concept behind the fractal varactor is to create a suspended movable plate possessing a specific fractal geometry, and to simultaneously create a bottom fixed plate complementary in
